GaAs semiconductor device

ABSTRACT

This invention relates to a GaAs semiconductor device and more particularly to a GaAs static induction transistor integrated circuit which operates at a very high speed. Gallium arsenide has the features that the mobility of electrons is higher than that in silicon and that the band structure has a direct gap. The mobility of electrons in gallium arsenide is several times as high as that in silicon; this is very suitable for the manufacture of a semiconductor device of high-speed operation. Further, since gallium arsenide has the direct gap, the electron-hole recombination rate is high and the minority carrier storage effect is extremely small. By causing the recombination at the direct gap, light emission can be achieved more efficiently. Accordingly, a light receiving and emitting semiconductor device can be obtained through the use of gallium arsenide. As the propagation velocity of light is very fast, signal transfer between semiconductor chips can be achieved at ultra-high speed. By combining this with the high mobility of electrons in gallium arsenide, an ultra-high speed logical operation device can be realized.

This is a continuation of application Ser. No. 35,460 filed May 3, 1979now U.S. Pat. No. 4,320,410.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to a GaAs semiconductor device, and moreparticularly to a semiconductor device employing an inversely configured(inversely operated) GaAs static induction transistor.

2. Description of the Prior Art

An I² L equivalent logic circuit (hereinafter referred to as SITL)employing an inversely configured static induction transistor(hereinafter referred to as SIT) has already been produced usingsilicon, by way of example and, as a result of this trial production, aminimum delay time of 3.5 msec and a value 2 fj in terms of the productof power and delay has been obtained. In view of the availability ofdesired materials and the degree of development of the manufacturingprocess for the fabrication of LSL's, the SITL will still be formedmainly of silicon in future. In the case of very high-speed logicaloperations being required, however, it will be necessary to form theSITL of a material of high mobility of carriers. A material of highmobility of carriers from which excellent quality is obtainable in arelatively stable manner and wherein the process for the manufacture ofthe SITL has been developed to some extent, is gallium arsenide except.But the manufacturing process for the GaAs semiconductor device is moreinferior to the manufacturing process using silicon and moredifficulties are encountered in the manufacture of a semiconductordevice of a desired configuration.

SUMMARY OF THE INVENTION

An object of this invention is to provide a GaAs static inductiontransistor integrated circuit which operates at a very high speed.

Gallium arsenide has the features that the mobility of electrons ishigher than in silicon and that the band structure has a direct gap. Themobility of electrons in gallium arsenide is several times as high asthat in silicon. This is very suitable for the manufacture of asemiconductor device of high-speed operation. Further, since galliumarsenide has the direct gap band structure, the electron-holerecombination rate is high and the minority carrier storage effect isextremely small. By causing the recombination at the direct gap, lightemission can be achieved more efficiently. Accordingly, a lightreceiving and emitting semiconductor device can be obtained through theuse of gallium arsenide. As the propagation velocity of light is veryfast, signal transfer between semiconductor chips can be achieved atultra-high speed. By combining this with the high mobility of electronsin gallium arsenide, an ultra-high speed logical operation device can berealized.

It is mainly due to poor manufacturing processes that has retarded thedevelopment of the GaAs semiconductor device in spite of its excellentfeatures. Of the manufacturing techniques for the GaAs device, theepitaxial growth method has appreciably been developed. Accordingly, itis preferred to employ a structure which enables the most efficient useof the epitaxial growth method.

In accordance with an aspect of this invention, as n⁻ type highresistance epitaxial region and an n⁺ type low resistance epitaxialregion are formed in layers on an n⁺ type GaAs substrate and asemiconductor device is formed effectively utilizing these two n typeregions. In some cases, these n⁺, n⁻ and n⁺ layer are sequentiallyformed on a p⁻ GaAs substrate or semi-insulating GaAs substrate.

In the case of using silicon, a silicon dioxide (SiO₂), i.e. anexcellent passivation film is formed by natural oxidation but, in usinggallium arsenide, no excellent passivation film has been developed. Anelectrically excellent insulating film of low surface state density ismechanically weak and poor in adhesion; but a mechanically stronginsulating film of good adhesion induces high surface state density andpresents problems in electrical properties.

Recently one of the present inventors and another researcher havediscovered that a gallium oxynitride film becomes an excellentpassivation film for gallium arsenide (Japanese Patent Applications Nos.38580/78 and 86573/78). A GaOxNy film having a small molar ratio betweenoxygen and nitrogen (less than 0.3, preferably less than 0.2), formed onthe GaAs surface, has very small surface state density and is veryexcellent as an insulating film of the GaAs semiconductor device.Further, a GaOxNy film whose oxygen-nitrogen molar ratio is increased(more than 0.2, preferably more than 0.3) as the distance from theinterface between the film and the GaAs surface increases, exhibitssmall surface state density and excellent performances in adhesion andin mechanical strength.

In accordance with another aspect of this invention, the GaOxNy film ofvarying oxygen-nitrogen molar ratio is used as the passivation film toprovide an excellent GaAs semiconductor device. A GaAs diode serves asan excellent light emitting or receiving element, as is known from alight emitting diode.

In accordance with a further aspect of this invention, a diode action asa light emitting or receiving element is incorporated in an integratedsemiconductor device to permit signal transfer between individualcircuits or semiconductor chips by a light signal.

According to an embodiment of this invention, there is provided a GaAssemiconductor device which comprises an n⁺ type GaAs substrate having afirst main surface, an n⁻ type GaAs epitaxial layer disposed on thefirst main surface and having a second main surface, a thin n⁺ type GaAsepitaxial surface layer disposed on at least one part of the second mainsurface of the n⁻ type GaAs epitaxial layer and having a third mainsurface, a first p⁺ type GaAs region substantially surrounding the n⁻type GaAs epitaxial layer and a first part of the n⁺ type GaAs epitaxialsurface layer, the width of the n⁺ type region surrounded by the p⁺ typeGaAs region being selected so that the n⁻ type region is sufficientlypinched off by a depletion layer owing to a diffusion potential of a p⁺n⁺ junction, a second p⁺ type GaAs region contiguous to the adjacentfirst p⁺ type region through a second part of the n⁺ type epitaxiallayer, a gallium oxynitride film formed on the second part of the n⁻type epitaxial layer and having an oxygen-nitrogen molar ratio of lessthan 0.3 in the neighborhood of the interface between the film and then⁻ type epitaxial layer, a first conductive electrode formed on thegallium oxynitride film, and a second conductive electrode making anohmic contact with the first p⁺ type GaAs region and electricallyconnected with the first conductive electrode. In this embodiment, avertical n channel GaAs static induction transistor and a lateral pchannel GaAs insulated electrode field effect transistor are integratedand the drain of the lateral GaAs field effect transistor is merged intothe gate of the vertical static induction transistor, thereby forming anI² L equivalent unit.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates an embodiment of an I² L type GaAs SIT inverter(one-input two-output) of this invention which employs a bipolartransistor as a load, FIG. 1A being an equivalent circuit, FIG. 1B aplan view and FIG. 1C a sectional view taken on the line 1C--1C' in FIG.1B;

FIG. 2 shows in section another embodiment of the I² L type GaAs SITinverter;

FIG. 3 shows in section another embodiment of the I² L type GaAs SITinverter of this invention which employs an IGFET as a load;

FIG. 4 illustrates another embodiment of this invention, FIG. 4A being aplan view and FIG. 4B a sectional view taken on the line IVB--IVB' inFIG. 4A;

FIG. 5 illustrates an embodiement of an I² L type SITL of this invention(a one-input four-output unit) which employs a splitted gate structure,FIG. 5A being a plan view and FIGS. 5B, 5C and 5D sectional viewsrespectively taken on the lines VB--VB', VC--VC' and VD--VD' in FIG. 5A;

FIG. 6 shows another embodiment of this invention in which a lightemitting diode is provided at an output part, FIG. 6A being anequivalent circuit diagram and FIG. 6B a sectional view of thisembodiment;

FIG. 7 illustrates another embodiment of this invention, FIG. 7A beingan equivalent circuit diagram, FIG. 7B being its plan view and FIGS. 7Cand 7D sectional views respectively taken on the lines VIIC--VIIC' andVIID--VIID' in FIG. 7B;

FIG. 8 shows another embodiment of this invention which operates on alight input; and

FIG. 9 shows an equivalent circuit diagram of another embodiment of thisinvention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

With reference to the drawings, the present invention will hereinafterbe described in detail.

FIG. 1A illustrates a one-input two-output I² L equivalent SITL invertercircuit which employs an SIT as a driving transistor and a bipolartransistor as a load transistor. FIG. 1B is a plan view of a specificoperative example of the inverter circuit of FIG. 1A and FIG. 1C is asectional view taken on the line IC--IC' in FIG. 1B. In FIG. 1C,reference numeral 11 indicates an n⁺ GaAs substrate; 12 designates n⁻regions formed on the substrate 11 through utilization of epitaxialgrowth techniques; and 15 identifies n⁺ regions similarly formed by theepitaxial growth method to overlie the n⁻ regions 12. That is, there areformed by the epitaxial growth method on an n⁺ GaAs substrate 11 the n⁻and n⁺ layers 12 and 15 of predetermined thicknesses and impurityconcentrations so that the n⁻ layers 12 respectively underlie the n⁺layers. Further, in this wafer there are formed in predetermined areasp⁺ regions 13 and 14 which are formed by diffusion or ion implantationfrom the surface of the n⁺ surface layer 15. The n⁺ type region 11constitutes a source region of the driving SIT and the n⁻ region 12forms a channel region of the driving SIT and a base region of thebipolar transistor (hereinafter referred to as BJT) for load use. The p⁺type region 13 serves as an emitter region of the BJT and the p⁺ typeregion 14 forms a common region which serves both as a collector regionof the BJT and a gate region of the SIT. The n⁺ regions 15-1 and 15-2respectively form drain regions of the SIT. Reference numerals 11', 13',14', 15-1' and 15-2' indicate electrodes. Ohmic contact electrodes ofthe p⁺ regions are formed on InAg, AgZn or the like and ohmic contactelectrodes of the n⁺ regions are formed of AuGe, AuGeNi or the like. Inthis case, it is also possible to deposit another metal on the ohmiccontact electrodes. Reference numeral 16 designates an insulating layer,which is formed, for example, of SiO₂ or Si₃ N₄ by sputtering or a CVDmethod, Al₂ O₃ by sputtering or GaOxNy by the CVD method, or acombination of them. Especially in the case requiring an insulatinglayer of low surface states, it is desirable that a GaOxNy film with amolar ratio between O and N (hereinafter referred to as the ON ratio)should be less than 0.3, at least in the neighborhood of the interfaceof the wafer. For enhancement of the adhesion and the mechanicalstrength of the insulating layer, it is preferred to increase theabovesaid molar ratio in the insulating film from the interface. Thegate to gate spacing (hereinafter width) and the impurity concentrationof the n⁻ channel region of the SIT for driving use are selected suchthat the channel is completely pinched off only with a diffusionpotential between the p⁺ gate region and the n⁻ channel region to holdthe SIT in a cut-off state. Where the impurity concentration of the p⁺region is about 10¹⁸ to 10²⁰ cm⁻³, a depletion layer extends mostly onthe side of the n⁻ channel region only. When impurity concentration ofthe n⁻ region is 1×10¹⁴ cm⁻³ and 1×10¹⁵ cm⁻³, the diffusion potential isabout 1.2 and 1.27 V in the case of the GaAs semiconductor device.

Accordingly, in the cases where the impurity concentration of thechannel is, for example, 1×10¹⁴ cm⁻³ and 1×10¹⁵ cm⁻³, if the channelwidth is selected to be smaller than about 5.0 and 1.58 μm, the channelis in a cut-off state at a zero gate bias; namely, a normally off SIT isobtained. It has been found that the standard of selection of theimpurity concentration N_(D) and the width 2a of the channel region isN_(D) (2a) ² <2.5×10¹⁵ cm⁻³, where N_(D) is in cm⁻³ and 2a in μm. As thedistance between the source and the drain region decreases, theabovesaid value, N_(D) (2a)², must be further reduced gradually. If thedistance l between the source and the drain region is too short ascompared with the channel width 2a, however low the impurityconcentration is selected, the cut-off state of the channel cannot beachieved under ordinary operative conditions. In order to provide apotential barrier of a certain height for preventing no current fromflowing even if a certain drain voltage is applied, the ratio, l/2a,must be larger than at least 0.5. In a pnp type bipolar transistor, itis desirable that the spacing between the p⁺ type regions 13 and 14 (thelength of the base region) is selected so that holes injected into thebase region from the emitter region are not quenched by recombination.In other words, it is preferred that the length of the n⁻ region betweenp⁺ regions 13 and 14 which does not become a depletion layer but retainselectrons (a non-depleted base region) is selected to be smaller thanthe diffusion length of the holes. Assuming, for instance, that the holemobility is about 350 cm³ /V·sec and that the lifetime of holes is about10 nsec, the diffusion length ld of the holes in the GaAs isapproximately 3 μm. Therefore, the spacing between the p⁺ type regions13 and 14 (the length of the base region) is selected to be thefollowing value or smaller: ##EQU1## where N_(D) is the impurityconcentration of the n⁻ type region, e is a unit charge, ε is thedielectric constant of the semiconductor and ld is the diffusion lengthof the hole.

For example, if the impurity concentration N_(D) of the n⁻ type regionis between 1×10¹⁴ cm⁻³ and 1×10¹⁵ cm⁻³, the spacing between the emitterand the collector is smaller than about 11 μm and 5.5 μm respectively.It is also possible to constitute a punch through bipolar transistor asa load transistor is which the non-depleted base region is removed toprovide a punch through state between the emitter and the collector.

In FIG. 1A, reference character V_(EE) indicates a power source voltage;Vin designates an input voltage; and Vout1 and Vout2 identify outputvoltages. The value of the power source voltage V_(EE) is selected suchthat appreciable forward current does not directly flow between the p⁺region 13 and the n⁺ region 11. The impurity concentration of the n⁺region 11 is usually 1×10⁸ cm⁻³ or more; therefore, a diffusionpotential between the p⁺ and n⁺ type regions 13 and 11 ranges from about1.4 to 1.5 V. The power source voltage V_(EE) is selected, for instance,in the range from 1.0 to 1.3 V. Of course, it may also be lower thanthis value. The impurity concentration in the n⁺ region 11 is desired ashigh as possible to improve the performance of the driver SIT, such aslow impedance, high transconductance and so on, as far as the quality ofthe semiconductor crystal can be reached. When the input voltage Vin tothe gate is at a low level (for example, 0.1 to 0.3 V), the driver SITis in its cut-off state, so that the output voltage Vout is at a highlevel (for example, approximately 0.8 to 1.2 V). In this case, a currentsupplied from the BJT for load use flows via an input terminal Vin tothe drain of a driver SIT of a preceding stage (not shown). When theinput voltage Vin is switched to a high level, the driver SIT becomesconductive to lower the output voltage Vout to a low level; namely aninverter operation is accomplished. When the gate voltage rises to ahigh level, a potential barrier set up in the channel is reduced orremoved and, simultaneously therewith, injection of electrons from thesource region is promoted by the space charge effect of holes injectedfrom the gate region, permitting a flow of a large current even if thechannel area is small. In other words, a large output current can berapidly controlled with a small signal current; this is one of thecauses of high-speed operation of the SITL.

The mobility of electrons in gallium arsenide is about five times ashigh as that in silicon. Accordingly, even if carriers of the samenumber exist as a result of application of the same voltage between thesource and drain, a current in the GaAs SIT is several times larger thanthat in the Si SIT corresponding to the above said higher mobility. Thatis, in the GaAs SIT the same current as flowable in the Si SIT can beobtained with the channel area about 1/5 or 1/6 that of the latter. Ifthe channel area can be reduced, then the gate structure surrounding thechannel can also be made small, by which the electrostatic capacity ofthe gate is decreased to enable a high-speed operation. To cut off theSIT in its operative state, the gate is made low-level and, at thistime, the storage time of minority carriers or holes injected into thechannel limits the cut-off speed. Since gallium arsenide has a bandstructure of direct transistion, the electron-hole reconbination time isshort and the storage time of the minority carriers is short in GaAs.Consequently, the cut-off time can also be shortened, permitting theGaAs SIT to perform a very high-speed operation. First portions 12-1 and12-2 of the intermediate layer 12 underlie portions 15-1 and 15-2 of thesurface layer. Second portion 12-5 of the intermediate layer 12underlies a portion of the surface layer 15 and an insulated layer 18.

The n⁺ layers, except 15-1 and 15-2 which ultimately serve as the drainsof the driving SIT, need not be formed. FIG. 2 shows another example ofthe one-input two-output SITL inverter in which such unnecessary n⁺surface layers are not grown by selective growth or selectively removedby etching. FIG. 3 shows an example which employs, as the loadtransistor an IGFET in which such n⁺ layers are removed. An insulatinglayer interposed between an electrode 14' and the n- region 12 is formedthin so as to create an inversion layer in the surface of the n⁻ region12. A gate insulating film of a GaAs IGFET is required to be of fewsurface states, so that a GaOxNy film having an O/N ratio of less than0.3 by the CVD method is excellent as such a gate insulating film. AGaOxNy film having an O/N ratio of about 0.1 to 0.2 is formed directlyon the surface of a semiconductor and, in this case, it is preferred togradually decrease the O/N ratio as the semiconductor surface isapproached, since the strength of the film is enhanced. In theillustrated examples, the gate electrode and the drain region aredirectly interconnected (or short-circuited); but it is possible, ofcourse, to provide a depletion mode FET in which the gate is directlyconnected to the source or to apply a predetermined potential foroperation.

In FIGS. 1 to 3, the p⁺ region is shown to reach the n⁺ region (thesubstrate) but the p⁺ region need not always extend down to the n⁺region or on the other hand, it may extend down into the n⁺ region.

The fabrication processes of the GaAs semiconductor device are stillunsatisfactory. But in multilayer epitaxial growth, whether it is vaporor liquid growth, the thickness and the impurity concentration of eachlayer are controlled with appreciably high reproducibility. With suchmultilayer epitaxial growth techniques, it is easy to form an n⁻ layerhaving an impurity concentration, for example, of about 5×10¹³ to 5×10¹⁵cm⁻³ to a thickness, for example, of 0.5 to about 4.0 μm on an n⁺substrate and form thereon an n⁺ layer having an impurity concentrationof about 10¹⁷ to 10¹⁸ cm⁻³ to a thickness, for example, of about 0.1 to1.0 μm. Needless to say, the thicknesses and the impurity concentrationsof the respective layers are not limited specifically to the abovesaidvalues. It is preferred in the GaAs semiconductor device to employ suchmultilayer epitaxial growth techniques as effectively as possible. Theselective formation of the p⁺ regions is achieved by, for example,diffusion of zinc. In the present manufacture of the GaAs semiconductordevice, the diffusion of zinc is substantially only one stable diffusionprocess. In the case where during the zinc diffusion process arsenic inthe GaAs crystal escapes therefrom so as to degrade its crystal quality,then if a vapor pressure of arsenic is applied so as to prevent suchescape of arsenic during the diffusion, then zinc can be diffusedwithout degarding the crystal (Conf. H. Otsuka, K. Ishiba and J.Nishizawa, "Annealing of n type GaAs under excess arsenic vapor", Jap.J. Appl. Phys. Vol. 8, p. 632, 1969, and J. Nishizawa, H. Otsuka, S.Yamakoshi and K. Ishida, "Non-stoichiometry of Te doped GaAs", Jap. J.Appl. Phys. Vol. 13, p. 46, 1974). The selective formation of the p⁺regions can also be carried out by ion implantation of cadmium orberyllium. In some cases, the n⁺ layers in the surface of thesemiconductor may also be formed by ion implantation or diffusion of theGroup VI elements, such as S, Se, Te, etc. The n⁺ layers having animpurity concentration of about 10¹⁸ cm⁻³ and a thickness of 0.1 to 0.2μm can be selectively formed by ion implantation of Se, for example. Atpresent since there is not available an insulating layer which serves asan excellent diffusion mask, the p⁺ region can be formed by the ionimplantation with higher accuracy rather than diffusion process. For theformation of the insulating layer, there is no highly reliable step likethermal oxidation of silicon; therefore, it is desirable to form theinsulating layer of GaOxNy, SiO₂, Si₃ N₄, Al₂ O₃ or AlN, or a mixture ofthem. Even at such an undeveloped present stage of the fabricationtechniques, however, the GaAs semiconductor devices of the arrangementsshown in the above examples can be obtained by a combination of thefabrication techniques, as described above.

In the examples shown in FIGS. 1 through 3, holes may in some cases beinjected from the p⁺ gate region 14 of the driver SIT to the surroundingregions. By preventing such unnecessary hole injection, an undesirableinjection of minority carriers is avoided to provide for enhancedcurrent gain of the driver SIT, speeding up its operation. To this end,it is possible to etch away the boundary portion of the gate region ofthe driving SIT and to fill therein an insulating material; but, sinceit has been found that gallium arsenide is made of high-resistivitymaterial by irradiation with protons, the use of such a process iseffective. FIGS. 4A and 4B illustrate an example of a structure which isthe same as shown in FIGS. 1B and 1C but in which the surroundingportion of the gate region is made high-resistance (semi-insulating).FIG. 4A is a plan view of such a structure and FIG. 4B is a sectionalview taken on the line IVB--IVB' in FIG. 4A. In this example, the p⁺regions 13 and 14 are formed by implanting beryllium or cadmium ionsinto the n.sup. - epitaxial layer formed on the n⁺ substrate, and then⁺, regions 15-1 and 15-2 are formed by implanting sulfur or seleniumions. The load transistor is formed as an insulated gate (IG) FET, whichhas an inversion layer 112 and operates in a depletion mode. The gateelectrode of the IGFET is directly connected with the source electrode.The surounding portion of the inverter unit is rendered by protonirradition into a high resistance isolation region 17. On the left sideof the p⁺ source region 13 of the IGFET there is formed another IGFETserving as a load transistor of another inverter unit. The insulatingfilm overlying the n⁻ region 12 and underlying the gate electrode ispreferred to be the aforementioned CaOxNy film of a small O/N ratio atleast adjacent to the surface. It is also possible to form the inverterunits individually and to completely surround each of them with asemi-insulating isolation region. Also, it is possible to dope thechannel region of the IGFET as by ion implantation to change itsperformance.

In gallium arsenide the electron-hole recombination rate is high and thelifetime of carriers is shorter than that in silicon and the minoritycarrier storage effect is small. In order that the minority carriers mayeffectively be injected only to the channel region and the minoritycarrier storage effect may be further decreased where the unnecessaryminority carrier injection into the n⁻ regions from the peripheral areaof the gate region of the driver SIT is completely suppressed, it iseffective to introduce a split gate structure proposed by the presentinventors in their prior U.S. patent application Ser. No. 920,542 (basedon Japanese Patent Application No. 154197/77 entitled "Static InductionTransistor and Semiconductor Integrated Circuit", Japanese PatentApplication No. 156149/77 entitled "Static Induction TransistorSemiconductor Integrated Circuit" and Japanese Patent Application No.157629 entitled "Semiconductor Integrated Circuit"). FIGS. 5A to 5Dillustrate an example of a one-input four-output semiconductor devicehaving the split gate structure.

FIG. 5A is a plan view of the semiconductor device and FIGS. 5B, 5C and5D are sectional views respectively taken on the lines VB--VB', VC--VC'and VD--VD' in FIG. 5A. A lateral load bipolar transistor and a verticaldriver SIT are formed on the inside of a non-driving gate region 55 anda bipolar transistor serving as a load transistor is formed centrally ofthe gate region 55. A p⁺ region 53 is an emitter region of the bipolartransistor, an n⁺ region 56 and n⁻ regions 52 formed on the outside ofthe region 53 are a base region of the bipolar transistor and a p⁺region 54 formed on the side of the region 56 is a collector region ofthe bipolar transistor. The collector region 54 of the bipolartransistor also serve as a driving gate for simultaneously controllingfour channels of the SIT which is a driver transistor. n⁺ type regions56-1, 56-2, 56-3 and 56-4 are drain regions respectively correspondingto the four outputs of the driver SIT. Below the n.sup. + type drainregions 56-1, 56-2, 56-3 and 56-4 there are disposed the n⁻ regions 52,each serving as a channel region and, on the outside thereof, there isdisposed the p⁺ region 55 serving as a non-driving gate. The channelsare each isolated from the others by forming the driving gate 54 and thenon-driving gate 55 in close proximity and pinching off the n⁻ typeregion 52 therebetween with a depletion layer. The n⁺ layer 56 overlyingthis isolating region 52 is not formed from the beginning or, afterbeing formed, is etched away. A region 51 (a substrate) is a sourceregion of the driven SIT and an emitter (injector) electrodes 53' anddrain electrodes 56-1' and 56-2' are formed on the emitter region 53 andthe drain regions 56-1 and 56-2 respectively. An electrode 55' (FIG. 5B)is formed to extend over the non-driving gate region 55 and the n⁺ layer56, so that the p⁺ non-driving gate region is electrically connected tothe n⁺ source region 51. An electrode 54' (FIG. 5D) on the driving gate54 acts as an input terminal for receiving an input from a precedingstage. The p⁺ region 55 is the non-driving gate region defining thechannel and, at the same time, functions as an isolation region betweenthe individual units. Where holes are injected from the driving gateregion 54 into the channel region 52, the non-driving gate region 55 isheld at a lower potential for the holes to be extracted from them.Accordingly, in this structure there is substantially no minoritycarrier storage effect. As almost all of the holes injected from thedriving gate region 54 have positive charges so they are effectivelyinjected into the channel region 52, these holes serve to introduceelectrons from the source region 51 into the channel region 52,resulting in increased current gain and drain current.

In the above embodiment, in the portion where the driving gate region 54is close to the non-driving gate region 55, the holes injected thereinmostly flow uselesly without serving to create a drain current.Accordingly, from the viewpoint of enhancement of characteristics of thesemiconductor device, it is preferred to deeply etch away such a portionto thereby reduce an unnecessary hole injection. This may also beachieved by making such a portion semi-insulating through utilization ofirradiation of protons. First portions 52-1 and 52-2 of the intermediatelayer 52 lie under first portions 56-1 and 56-2 of the surface layer.Second portions 52-2 of the intermediate layer simularly lie undersecond portions of the surface layer 56.

With the split gate structure shown in FIGS. 5A to 5D, the electrostaticcapacity of the driving gate is small and the current gain is notlowered so greatly and substantially no minority carrier storage effectis produced; therefore, a very high-speed operation is possible and thenon-driving gate region acts as an isolation region, too. By formingside by side a plurality of such units as shown in FIG. 5 and obtainingwired logic, desired logic can be set up and the integration density isalso very high.

Since the I² L equivalent SITL is capable of constituting wired logic,once such a basic inverter as depicted in FIG. 1 has been constructed,it is sufficient only to select output terminals of the inverter atdesired values and to connect them to the inverter by wired coupling, inorder to provide a circuit performing a desired function. The foregoingdescription has been given only of the embodiments employing an n⁺substrate but it is also possible to grow an n⁺ layer on a p typesubstrate or semi-insulating substrate and then form the device of thisinvention. Even by making opposite the conductivity types of all theparts, a similar GaAs semiconductor device can also be obtained by themobility of holes in gallium arsenide is much lower than the mobility ofelectrons; therefore, an element performing a high-speed operation ispreferred to be arranged so that a main current is carried by electrons.A p type high purity region is rather difficult to form; and accordinglyeven in the case where holes carry a current, it is desirable to makesuch an arrangement that the holes migrate in an n type region or aninversion layer formed therein.

As the scale of an integrated circuit becomes large, the numbers ofinput and output terminals of a semiconductor chip greatly increase. Atpresent, bonding pads are usually provided on the peripheral portion ofthe chip for external connections via metallic wires or tapes; however,an increase in the numbers of input and output terminals increases thetotal area occupied by the bonding pads, preventing enhancement of theintegration density. Further, an increased number of bonding pads causeslowering of the yield and reliability of chips. Since gallium arsenidehas a band structure of direct transition, a light emitting diode orinjection laser of very high efficiency can be obtained. By forming thinp⁺ regions of predetermined areas at those portions of the chip whichwill ultimately be occupied by input and output terminals and byapplying a current in a forwardly biased condition, a light emittingdiode of very high efficiency is provided, whereas by applying a reversebiase, a photo diode serving as a photo detector is obtained. In otherwords, information transfer between chips can be accomplished opticallynot electrically via a metallic wire. For efficiently leading light tothe outside to focus the light on a predetermined position of anotherchip, it is also possible to form on the GaAS surface lens means ofSiO₂, SiO, Si₃ N₄ O, GaAlO, Al₂ O₃, GaOxNy or a dielectric of a mixtureof them. Such a lens is formed on a light emitting diode or a photodiode to perform a light collecting operation, by which the signaltransfer efficiency can be improved. Of course, it is also effective tointerconnect in parallel many chips between their predetermined twolocations by means of optical fibers. The coupling by light need notalways be achieved on the peripheral portions of the chips but it isdesirable to provide input and output terminals at optimum positionswhere the most efficiently is obtained. For connecting many chips, suchan arrangement may also be made that the light receiving photo diode ofeach chip is disposed at the position corresponding to the lightemitting diode acting as the output terminal of another chip. It is alsopossible to provide the light receiving diode on one side of each chipand the light emitting diode on the other side. For example, byarranging the chips in a staggered relationship to adjacent ones ofthem, a large number of chips can be actuated by photo coupling.

FIGS. 6A and 6B show an example in which a light emitting diode isdisposed at the output terminal portion and FIGS. 7A to 7D show anexample in which a photo diode is formed at the input terminal portion.In FIG. 6, reference characters T₁ and T₂ indicate bipolar transistorsconnected as loads; T₃ designates a driver SIT; and D identifies a lightemitting diode. The bipolar transistor T₁ is a load transistor of apreceding stage and a stage having a light output is made up of thetransistors T₂ and T₃ and the diode D. When the transistor T₃ is in itscut-off state, its drain is at a high level, so that a current flowingin the load transistor T₂ is fed to the light emitting diode D to emitlight. When the SIT is conductive, the potential at its output terminalbecomes low-level, with the result that no current flows in the lightemitting diode and hence no light is emitted therefrom. In other words,the light emitting diode D emit or does not emit light in dependence onwhether the output from the SIT T₃ is high- or low-level. Where thedriver transistor T₃ of SITL is formed with an n channel junction SIT,as in the case of FIG. 6A, then its gate region becomes p typenaturally. Hence, a main electrode of an injector (load) transistormerged into the gate is a p type region. If an n type region is formedadjacent such a p type region to provide a diode, a light output can bederived from any stage of a logical circuit. It will be seen that theanode of the diode can be electrically connected to the next stage. FIG.6B shows an example of an integrated structure of the transistors T₂ andT₃ and the diode D in FIG. 6A, which constitute a logical unit. In FIG.6B, reference numeral 61 indicates an n⁺ substrate; 62 designates an n⁻type epitaxial growth layer; 63 identifies an emitter region of thetransistor T₃ ; 64 denotes a collector region of the transistor T₂ ; 65represents a gate region of the transistor T₃ ; 66 shows a drain regionof the transistor T₃ ; 67 refers to a p⁺ region of the light emittingdiode D; 68 indicates an insulating layer; 63' designates an emitterelectrode; 65' identifies a gate electrode of the SIT; and 66' denotes adrain electrode. The p⁺ region 64 is connected via the drain electrode66' to the drain region 66. It is because of a small diffusion potentialdifference between the p⁺ and n⁻ type regions that substantially noforward current flows between the p⁺ and n⁺ regions 63 and 61 but that acurrent flows in the route (p⁺ region 67 - n⁻ type epitaxial growthlayer 62 - n⁺ type substrate 61).

In order to further facilitate flowing of a current in the lightemitting diode, it is sufficient only to lower the impurityconcentration of the region 62 defined between the p⁺ and n⁺ regions 67and 61. In the case of using a substance that provides a greatdifference in mobility between electrons and holes, such as galliumarsenide, electrons of high mobility play the principal part ininjection. Accordingly, the region 62 between the p⁺ and n⁺ regions 67and 61 may also be a p type high resistivity region, not n⁻ type shown.The intermediate layer 62 as portions 62-1, 62-5 and 62-6, the portion52-6 lying between regions 67 and 61. It is effective, of course, tomake the power source voltage only at the output stage a little higherthan the other parts so as to facilitate a current flow. Needless tosay, the output part need not always be a light emitting diode but mayalso be a semiconductor laser.

In FIG. 7A, reference character T₄ indicates a driver SIT; T₅ designatesa load bipolar transistor; and D₁ identifies a photo diode serving as aphoto detector. When no light is incident on the photo diode D₁, thegate of the transistor T₄ is at a high level and the transistor T₄ isconductive. Upon incidence of light on the photo diode D₁, a voltageacross the diode D₁ drops to permit the passage therethrough of acurrent from the load transistor T₅, cutting off the transistor T₄. FIG.7B is a plan view, FIGS. 7C and 7D are sectional views respectivelytaken on the lines VIIC--VIIC' and VIID--VIID' in FIG. 7B. This exampleis substantially identical in basic construction with the example ofFIG. 6. In FIGS. 7B to 7D, reference character 71 indicates an n⁺substrate; 72 designates an n⁻ epitaxial growth layer; 73 identifies anemitter region of the load transistor; 74 denotes a region serving bothas a collector region of the load transistor and a driving gate regionof the driver SIT; 75 represents a non-driving gate region of the driverSIT; 76-1 and 76-2 show a drain region of the SIT; 77 refers to a p⁺region of the photo diode; 78 designates an insulating layer; 73'identifies an emitter electrode; and 76-1' and 76-2' denote drainelectrodes. A region 79 is a p⁻ type high resistivity region forenhancement of the light receiving efficiency, as described previously.If the region 79 is made n⁻ type as in the case of the diode D shown inFIG. 6B, the manufacturing process is simple. In the present example,the photo diode is connected in forward direction but, of course, it mayalso be connected in backward direction. Portions 72-1, 72-2 and 72-5 ofthe intermediate layer 72 lie under portions of the surface layer 76.

FIG. 8 illustrates a modified form of the example of FIG. 7 in which thephoto diode is connected in a backward direction and used as a lightinput part. In this example, the load transistor is an IGFET. A lightinput Pin is applied to the photo diode in a reverse biased condition.Upon incidence of light on the photo diode, a current flows therein, sothat the gate of the SIT is charged up to a predetermined potential tomake the SIT conducting. Upon extinction of the incidence of light, thecurrent supply to the gate of the SIT is stopped and the gate potentialreturns to its low level to cut off the SIT. By combining thisconstruction with that of FIG. 6, a photo inverter is obtained. Thepower source voltage V_(EE) ' depends on the characteristic of the photodiode and is usually higher than V_(EE).

When the SIT performing the function of an inverter is biased betweenits gate and drain too deeply in the forward direction, the operatingspeed is decreased. For improvement of the operating speed, it isundesirable to bias the SIT between its gate and drain too deeply in theforward direction such, for example, that the gate voltage is 0.8 to 1.1V at the high level and the drain is 0.2 V at the low level. In orderthat the voltage difference between the gate and drain may be not solarge, Schottky diodes D₁ and D₂ are inserted between the gate and drainof the SIT, as depicted in FIG. 9. In the example of FIG. 9, the loadtransistor is a MOSFET. Letting V_(f) represent a forward drop voltageof the Schottky diode, the voltage difference between the high and lowlevel does not exceed V_(f). The Schottky diode can be formed by vapordeposition or plating of Al, Pt, Pd or like metal. Such a Schottky diodeis provided at one portion of the surface of the p⁺ gate region of theinverter SIT and directly connected with the drain through an electrode.Alternatively, the Schottky diode is formed at one part of the drain andconnected with the gate region. In a GaAs device, the barrier height ofa Schottky junction in an n type region is usually larger than thebarrier height of a Schottky junction in a p type region. Consequently,in the case of reducing the voltage difference between the high and lowlevels, the Schottky junction is provided in the p⁺ gate region, whereasin the case of requiring a little large voltage difference the Schottkyjunction is formed in the n⁺ drain region.

While the present invention has been described above in connection withthe GaAs semiconductor device constructed using a dual epitaxial layer,a further multilayer structure can also be employed. For example, it isalso possible to from n and p⁺ layers on the p⁺ type gate region of theload transistor by epitaxial growth and to combine them with the p⁺ typegate region, thereby to provided a pnp bipolar transistor which is usedas an injector (load) transistor.

In the I² L equivalent SITL using the GaAs SIT according to thisinvention, the recombination rate of minority carriers injected into thechannel is high and the storage effect is small since gallium arsenidehas high mobility of electrons and a direct transistion characteristic;therefore, the GaAs I² L equivalent SITL is of particular utility whenemployed in the case of a high-speed operation is required, and can bemanufactured by the present fabrication techniques and hence is veryvaluable from the industrial point of view.

It will be apparent that many modifications and variations may beeffected without departing from the scope of novel concepts of thisinvention.

What is claimed is:
 1. A GaAs semiconductor device, comprising:an n typeGaAs layer of low resistivity; an n type intermediate GaAs layer of highresistivity overlying said n type layer; an n type GaAs surface layer oflow resistivity overlying said n type intermediate layer; a first p typeGaAs region of low resistivity having a through hole path therein,extending from the surface of said n type surface layer at least intosaid n type intermediate layer, surrounding a first portion of each ofsaid n type surface layer and said n type intermediate layer anddefining a continuous n type current path between said n type layer andsaid first portion of the n type surface layer; the first portion ofsaid n type intermediate layer having such dimensions that the built-involtage of the pn junction with the first p type region established adepletion layer therein to produce a potential barrier for electrons insaid continuous n type current path without any external bias applied tosaid first p type region; a second p type GaAs region of low resistivitylocated in said n type intermediate layer in the neighborhood of saidfirst p type region and sandwiching a second portion of said n typeintermediate layer therebetween; the n type layer, the first portions ofthe n type intermediate layer and the n type surface layer and the firstp type region constituting a source, a channel, a drain and a gate of ann channel static induction transistor; the second p type region, thesecond portion of the n type intermediate layer of the first p typeregion constituting an emitter, a base and a collector of a pnp bipolartransistor.
 2. A GaAs semconductor device comprising:an n type layer oflow resistivity overlying said n type layer of low resistivity; an ntype GaAs surface layer of low resistivity overlying said n typeintermediate layer; a first p type GaAs region of low resistivity havinga through hole path therein, extending from the surface of said n typesurface layer at least into said n type intermediate layer, surroundinga first portion of each of said n type surface layer and said n typeintermediate layer and defining a continuous n type current path betweensaid n type layer and said first portion of the n type surface layer;the first portion of said n type intermediate layer having suchdimensions that the built-in voltage of the pn junction with the first ptype region establishes a depletion layer therein to produce a potentialbarrier for electrons in said continuous n type current path without anyexternal bias applied to said first p type region; and a second p typeGaAs region of low resistivity located in said n type intermediate layerin the neighborhood of said first p type region and sandwiching a secondportion of said n type intermediate layer therebetween; the n typelayer, the first portions of the n type intermediate layer and the ntype surface layer and the first p type region constituting a source, achannel, a drain and a gate of an n channel static induction transistor,the second p type region, the second portion of the n type intermediatelayer and the first p type region constituting an emitter, a base and acollector of a pnp bipolar transistor; a photodiode for converting alight signal into an electrical signal, including a p type anode regionelectrically connected to at least one p type region and an n typecathode region located adjacent to and forming a pn junction with saidanode region and adapted to be supplied with a positive bias voltage. 3.A GaAs semiconductor device, comprising:a n type GaAs layer of lowresistivity; a n type intermediate GaAs layer of high resistivityoverlying said n type layer; a n type GaAs surface layer of lowresistivity overlying said n type intermediate layer; a first p typeGaAs region of low resistivity having a through hole path therein,extending from the surface of said n type surface layer at least intosaid n type intermediate layer surrounding a first portion of each ofsaid n type surface layer and said n type intermediate layer anddefining a continuous n type current path between said n type layer andsaid first portion of the n type surface layer; the first portion ofsaid n type intermediate layer having such dimensions that the built-involtage of the pn junction with the first p type region establishes adepletion layer therein to produce a potential barrier for electrons insaid continuous n type current path without any external bias applied tosaid first p type region, a second p type GaAs region of low resistivitylocated in said n type intermediate layer in the neighborhood of saidfirst n type region and sandwiching a second portion of said n typeintermediate layer therebetween; an insulated electrode structure formedon said second portion of the n type intermediate layer; the n typelayer, the first portions of the n type intermediate layer and the ntype surface layer and the first p type region constituting a source, achannel, a drain and a gate of an n channel static induction transistor,the second p type region, the second portion of the n type intermediatelayer, the first p type region and the insulated electrode structureconstituting a source, a channel, a drain and an insulated gateelectrode of an insulated gate field effect transistor.
 4. A GaAssemiconductor device, comprising:an n type GaAs layer of lowresistivity; an n type intermediate GaAs layer of high resistivityoverlying said n type layer; an n type GaAs surface layer of lowresistivity overlying said n type intermediate layer; a first p typeGaAs region of low resistivity having a through hole path therein,extending from the surface of said n type surface layer at least intosaid n type intermediate layer, surrounding a first portion of each ofsaid n type surface layer and said n type intermediate layer anddefining a continuous n type current path between said n type layer andsaid first portion of the n type surface layer; the first portion ofsaid n type intermediate layer having such dimensions that the built-involtage of the pn junction with the first p type region establishes adepletion layer therein to produce a potential barrier for electrons insaid continuous n type current path without any external bias applied tosaid first p type region, a second p type GaAs region of low resistivitylocated in said n type intermediate layer in the neighborhood of saidfirst n type region and sandwiching a second portion of said n typeintermediate layer therebetween; an insulated electrode structure formedon said second portion of the n type intermediate layer; the n typelayer, the first portions of the n type intermediate layer and the ntype surface layer and the first p type region constituting a source, achannel, a drain and a gate of an n channel static induction transistor,the second p type region, the second portions of the n type intermediatelayer, the first p type region and the insulated electrode structureconstituting a source, a channel, a drain and an insulated gateelectrode of an insulated gate field effect transistor; and a photodiodefor converting a light into an electrical signal, including a p typeanode region electrically connected to at least one p type region and ann type cathode region located adjacent to and forming a pn junction withsaid anode region and adapted to be supplied with a positive biasvoltage.
 5. A GaAs semiconductor device, comprising:an n type GaAs layerof low resistivity; an n type intermediate GaAs layer of highresistivity overlying said n type layer; an n type GaAs surface layer oflow resistivity overlying said n type intermediate layer; a first p typeGaAs region of low resistivity having a through hole path therein,extending from the surface of said n type surface layer at least intosaid n type intermediate layer, surrounding a first portion of each ofsaid n type surface layer and said n type intermediate layer anddefining a continuous n type current path between said n type layer andsaid first portion of the n type surface layer; the first portion ofsaid n type intermediate layer having such dimensions that the built-involtage of the pn junction with the first p type region establishes adepletion layer therein to produce a potential barrier for electrons insaid continuous n type current path without any external bias applied tosaid first p type region, a second p type GaAs region of low resistivitylocated in said n type intermediate layer in the neighborhood of saidfirst p type region and sandwiching a second portion of said n typeintermediate layer therebetween; the n type layer, the first portions ofthe n type intermediate layer and the n type surface layer and the firstp type region constituting a source, a channel, a drain and a gate of ann channel statis induction transistor, the second p type region, thesecond portion of the n type intermediate layer and the first p typeregion constituting an emitter, a base and a collector of a pnp bipolartransistor; and a semi-insulating GaAs region formed by ion bombardmentand surrounding said n channel static induction transistor and saidbipolar transistor therein.